Precision Ceramic Components

Corrosion- and heat-resistant components for semiconductor equipment

Precision Ceramic Components

Product Introduction

Made from high-purity alumina, zirconia, and other advanced ceramics via precision forming and sintering, these components offer excellent corrosion and heat resistance. They serve as chamber liners for etchers and PVD/CVD tools, electrostatic chucks (ESC), and insulating rings—key parts ensuring stable, reliable operation of core semiconductor manufacturing equipment.

Specifications

Material고순도 알루미나, 지르코니아 세라믹
Feature플라즈마 부식 저항, 열안정성 우수
Core Applications식각기, PVD/CVD 챔버 라이너
Development정전 척(ESC) 개발 중
GZO/AGZO Target
7N Ultra-High-Purity Indium

Other Recommended Products

RECOMMENDED PRODUCTS

View All