RPD coating and IZO zirconium-doped oxide target
| RPD Density | ≥ 6.8 g/cm³ |
| RPD Grain Size | ≤ 10 μm |
| RPD Resistivity | ≤ 10 mΩ·cm |
| IZO Density | (111) ≥ 5.58 g/cm³ |
| IZO Resistivity | ≤ 10 mΩ·cm |
| Max Segment Length | 550 mm |
| Composition | ITO/IZO/인듐 프리 등 (맞춤) |
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